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圖書導航
多層膜集成結構體聲波諧振器（英文版）
作者:張亞非 陳達
字數:214
頁數:214
版次:
定價:68
ISBN:978-7-313-08736-2
出版日期:2013/02
圖書簡介
本書系統地闡述了薄膜體聲波諧振器的基本原理、設計方法、關鍵技術及其材料體系的要求🤹🏼，並對薄膜體聲波諧振器的重要應用技術進行了總結概括與深入分析。圖書目錄
Chapter 1 Introduction
Chapter 2 Propagation of Acoustic Wave in Crystals
Chapter 3 The Theory of FBAR
Chapter 4 The Deposition and Etching of AIN Film
Chapter 5 The FBAR with Membrane Structure
Chapter 6 Solidly Mounted Acoustic Resonator
Chapter 7 The Applications of FBAR in RF Filters
Chapter 8 The FBAR Excited by Lateral Filed
Chapter 9 High Sensitive Sensors Based on FBAR
Index
Chapter 2 Propagation of Acoustic Wave in Crystals
Chapter 3 The Theory of FBAR
Chapter 4 The Deposition and Etching of AIN Film
Chapter 5 The FBAR with Membrane Structure
Chapter 6 Solidly Mounted Acoustic Resonator
Chapter 7 The Applications of FBAR in RF Filters
Chapter 8 The FBAR Excited by Lateral Filed
Chapter 9 High Sensitive Sensors Based on FBAR
Index
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